半导体制造系统改进Petri网模型的建立及优化调度

苏国军, 汪雄海

Optimal scheduling of semiconductor manufacture system based on improved Petri net model

SU Guo-jun, WANG Xiong-hai

系统工程理论与实践 . 2011, (7): 1372 -1377 . DOI: 10.12011/1000-6788(2011)7-1372