Scheduling study for time-constrained wafer fabrication equipments with chamber cleaning operations

ZHEN Lu, ZHANG Xiaoqin, YANG Fajun

Systems Engineering - Theory & Practice ›› 2023, Vol. 43 ›› Issue (8) : 2395-2411.

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Systems Engineering - Theory & Practice ›› 2023, Vol. 43 ›› Issue (8) : 2395-2411. DOI: 10.12011/SETP2022-2338

Scheduling study for time-constrained wafer fabrication equipments with chamber cleaning operations

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{{article.zuoZheEn_L}}. {{article.title_en}}. Systems Engineering - Theory & Practice, 2023, 43(8): 2395-2411 https://doi.org/10.12011/SETP2022-2338

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