Modeling and scheduling of single-arm tree-like multi-cluster tools with two-space buffering modules

HUANG Peng, BAI Liping, ZHU Qinghua

Systems Engineering - Theory & Practice ›› 2018, Vol. 38 ›› Issue (12) : 3244-3252.

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Systems Engineering - Theory & Practice ›› 2018, Vol. 38 ›› Issue (12) : 3244-3252. DOI: 10.12011/1000-6788(2018)12-3244-09

Modeling and scheduling of single-arm tree-like multi-cluster tools with two-space buffering modules

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{{article.zuoZheEn_L}}. {{article.title_en}}. Systems Engineering - Theory & Practice, 2018, 38(12): 3244-3252 https://doi.org/10.12011/1000-6788(2018)12-3244-09

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