Research on preventive maintenance modeling method of semiconductor devices

AO Yinhui, CHANG Peng

Systems Engineering - Theory & Practice ›› 2017, Vol. 37 ›› Issue (3) : 782-789.

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Systems Engineering - Theory & Practice ›› 2017, Vol. 37 ›› Issue (3) : 782-789. DOI: 10.12011/1000-6788(2017)03-0782-08

Research on preventive maintenance modeling method of semiconductor devices

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{{article.zuoZheEn_L}}. {{article.title_en}}. Systems Engineering - Theory & Practice, 2017, 37(3): 782-789 https://doi.org/10.12011/1000-6788(2017)03-0782-08

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