Optimal scheduling of multi-cluster tools with two-space buffering module

LI Wentao, BAI Liping, WU Naiqi, YANG Fajun

Systems Engineering - Theory & Practice ›› 2016, Vol. 36 ›› Issue (9) : 2408-2415.

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Systems Engineering - Theory & Practice ›› 2016, Vol. 36 ›› Issue (9) : 2408-2415. DOI: 10.12011/1000-6788(2016)09-2408-08

Optimal scheduling of multi-cluster tools with two-space buffering module

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{{article.zuoZheEn_L}}. {{article.title_en}}. Systems Engineering - Theory & Practice, 2016, 36(9): 2408-2415 https://doi.org/10.12011/1000-6788(2016)09-2408-08

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